发明名称 |
Verfahren zur Herstellung glaspassivierter Halbleiterbauelemente |
摘要 |
The semiconductor element mfr. has crystal orientated highly doped semiconductor layers (3,4) formed in the opposing surfaces of a semiconductor disc (1), before application of a marking layer (5). The semiconductor layer (3) and the masking layer (5) on one side of the semiconductor disc (1) are structured by the formation of recesses at a given orientation to the crystal orientation, with subsequent etching to form channels of defined width and depth and angled sides, filled with a glass paste after removal of the masking layer (5). USE/ADVANTAGE - Esp. for power semiconductor element or diode mfr. Reduced mfg. complexity and cost. |
申请公布号 |
DE4114660(C2) |
申请公布日期 |
1997.09.18 |
申请号 |
DE19914114660 |
申请日期 |
1991.05.06 |
申请人 |
TEMIC TELEFUNKEN MICROELECTRONIC GMBH, 74072 HEILBRONN, DE |
发明人 |
LUEFTINGER, ERNST, ALTMUENSTER, AT |
分类号 |
H01L23/31;H01L29/06;(IPC1-7):H01L23/28;H01L21/78 |
主分类号 |
H01L23/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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