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发明名称
PHOTOSENSITIVE RESIN COMPOSITION AND PROCESS FOR FORMING FINE PATTERN USING SAME
摘要
申请公布号
JPS6370245(A)
申请公布日期
1988.03.30
申请号
JP19860213739
申请日期
1986.09.12
申请人
TOSOH CORP;MATSUSHITA ELECTRIC IND CO LTD
发明人
HASEGAWA MASAZUMI;ENDO MASATAKA;OGAWA KAZUFUMI;TODOKO MASAAKI;FUKUDA SANJIYU
分类号
G03F7/09;G03F7/095;G03F7/11
主分类号
G03F7/09
代理机构
代理人
主权项
地址
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