| 发明名称 |
PROCESS FOR MANUFACTURING AN ELECTRICAL RESISTOR HAVING A POLYCRYSTALLINE SEMICONDUCTOR MATERIAL, AND INTEGRATED CIRCUIT DEVICE COMPRISING THIS RESISTOR |
| 摘要 |
<p>1. Process for manufacturing a resistor (11) by implantation of electrically inactive ions in an area of a polycrystalline semiconductor material (17b) doped with a strong dose of electrically active ions, characterised in that the electrically inactive ions belong to the family of rare gases.</p> |
| 申请公布号 |
EP0107556(B1) |
申请公布日期 |
1988.03.30 |
| 申请号 |
EP19830401950 |
申请日期 |
1983.10.06 |
| 申请人 |
BULL S.A. |
发明人 |
BOUDOU, ALAIN;MARCHETAUX, JEAN-CLAUDE |
| 分类号 |
C23C16/02;H01L21/02;H01L21/265;H01L21/3215;H01L21/822;H01L27/04;H01L27/11;(IPC1-7):H01L21/31 |
主分类号 |
C23C16/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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