ALIGNMENT APPARATUS OF STEPPER AND CONTROL METHOD THEREFOR

摘要

Fine circuits of various forms that are carved on the mask 1(1) are recorded after becoming frost deposit on the workpiece(3) through the projection lenz(2) when the power is admitted. To record the fine circuits carved on the mask 1(1) precisely, workpiece is controlled to be laid perpendicular to the optical axis of the projection lenz while located at the image point of the projection lenz. The actuator(5) operates by receiving order from control part(6) and the control part(6) gives order to actuator after calculating the required moving distance for the actuator by operating the array signal that is detected from the CCD(charge coupled device) 1(8) and CCD 2(7). By this process the focus and horizontality are controlled automatically.