Method for forming fine patterns of conjugated polymers.

摘要

A method for forming a pattern of a conjugated system polymer, which can be doped to give it electrical conductivity, comprises forming on a substrate a thin film of a polymeric sulfonium salt having recurring units of the formula: (wherein R1 represents a group capable of conjugating with an adjacent vinylene group formed by elimination of sulfonium salt as a side chain; R2 and R3 each represent a C2-C20 hydrocarbyl group; and X<-> represents a counter ion); irradiating the thin film with a prescribed pattern of light including deep ultraviolet rays having a wavelength not longer than 300 nm; and then subjecting the irradiated thin film to development to remove unexposed material.