| 摘要 |
PURPOSE:To obtain a stable adjusting method without aging, by emitting a laser beam under the state photoresist is applied to the surface, thereby adjusting the value of resistance, and removing the remaining dust at the cut part by immersing the device in etchant. CONSTITUTION:A conductor layer 3a is formed through a resistance film 3b for increasing adhearing force of a conductor material on an insulating substrate 5. Then, a photoresist film 6 is uniformly applied. Thereafter, a laser beam is projected, and a part of the conductor part is removed to the depth reaching the insulating substrate 5. Then a cut groove 3c is formed. The entire integrated circuit is immersed in etchant for the conductor and the resistor body. Then, the cut part without remaining dust is obtained as the cut part 3c. At this time, even overetching is performed, no change occurs in the resistor part. Therefore, the etching is performed for the sufficient time. Then the photoresist is removed.
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