SEMICONDUCTOR EXPOSURE DEVICE,申请号JP19860212748-传众专利搜索

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发明名称	SEMICONDUCTOR EXPOSURE DEVICE
摘要
申请公布号	JPS6370418(A)	申请公布日期	1988.03.30
申请号	JP19860212748	申请日期	1986.09.11
申请人	CANON INC	发明人	YOSHIDA MAKOTO;HAMAZAKI FUMIYOSHI
分类号	H01L21/30;G03F7/20;H01L21/027	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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