摘要 |
PURPOSE:To achieve a higher resolving power with a simple construction, by forming a charge latent image on a photoconductive layer by light generated from a phosphor layer into which light transmitted through an object to be inspected is incident to read the charge latent image with a detection head. CONSTITUTION:When X rays transmitted through an object 17 to be inspected are incident into a CsI layer 13 passing through an Al substrate 11 and an Al2O3 layer 12 while the entire surface of an a-Si layer 15 is charged uniformly with a positive charge, a part thereof is converted into light, which is made incident into the a-Si layer 15 to generate an electronic hole pair. The X rays transmitted through the CsI layer 13 enters the a-Si layer 15 and also excites the a-Si layer 15 to generate an electronic hole pair. The electronic hole pairs thus generated charge the amount of charge of the a-Si layer 15 previously charged to form a charge latent image corresponding to a transmission X ray image on the surface of the a-Si layer 15. Then, the charge latent image is scanned with a detection head 16 and read out as electrical signal to reproduce an X ray image.
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