发明名称 Laser machining apparatus with controllable mask
摘要 A laser machining apparatus is disclosed. The laser machining apparatus includes a marking table, a laser, a first optical system for converting a laser beam emanating from the laser into a parallel beam, a device for generating a transparent optical aperture by controlling an optical material in either an electrical or an optical manner, a device for directing the parallel beam output from the first optical system toward the optical aperture, and a second optical path for focusing the optical aperture on a sample which is located on the marking table.
申请公布号 US4734558(A) 申请公布日期 1988.03.29
申请号 US19840610342 申请日期 1984.05.14
申请人 NEC CORPORATION 发明人 NAKANO, MASAKAZU;YOSHINO, YOIHI
分类号 B23K26/06;G02F1/03;G02F1/135;(IPC1-7):B23K26/00 主分类号 B23K26/06
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