MOLECULAR BEAM SOURCE CELL,申请号JP19860214469-传众专利搜索

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发明名称	MOLECULAR BEAM SOURCE CELL
摘要
申请公布号	JPS6369219(A)	申请公布日期	1988.03.29
申请号	JP19860214469	申请日期	1986.09.10
申请人	SUMITOMO ELECTRIC IND LTD	发明人	TAKAGISHI SHIGENORI;MORI HIDEKI
分类号	H01L21/26;H01L21/203	主分类号	H01L21/26
代理机构		代理人
主权项
地址

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