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发明名称
VACUUM PROCESSING METHOD
摘要
申请公布号
JPS6369230(A)
申请公布日期
1988.03.29
申请号
JP19860211640
申请日期
1986.09.10
申请人
HITACHI LTD
发明人
OIKAWA SHINZO;ARIMATSU KEIJI
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
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地址
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