| 摘要 |
PURPOSE:To form an electrode forming surface to a flat surface shape having excellent crystallinity and to improve electrical and optical characteristics and reliability by burying an irregular surface in a second stage crystal growth layer shaped through a vapor crystal growth method through a liquid crystal growth method. CONSTITUTION:A second stage crystal growth layer 3 is grown through a liquid crystal growth method, the surface section of the layer 3, a sawtooth shaped surface 35 section, is melted through treatment at a high temperature in the same furnace, and a gentle irregular-shaped clean surface 36 is formed previously. The surface 36 section is buried by a surface burying layer 5 through the liquid crystal growth method such as an LPE method, and the surface burying layer 5 is shaped onto the second stage crystal growth layer 3. The liquid crystal growth method such as the LPE method completely differs from a vapor crystal growth method such as a MOCVD method or an MBE method used for growing the second stage crystal growth layer 3, and does not hold the surface shape of a lower layer as it is, and flatly buries the surface of the lower layer, thus forming the surface to a flat (100) face having excellent crystallizability. |
