发明名称 FLOATING POLISHING DEVICE
摘要 PURPOSE:To allow only abrasive grains to contact the minute projections on the surface of a ground article by forming a fluid film between a grinding basic member and the ground article and preventing the abrasive grains from always contacting the ground article and allowing the basic member in the floating-up state to approach the ground article by a loading means. CONSTITUTION:The grinding sheets 1 installed onto the right and left rotors 6 in pairs are positioned onto the both surfaces of a magnetic disc 3 mounted onto a hollow spindle 5. Then, the disc 3 and the sheets 1 are relatively revolved in the noncontact state by the fluid film which is formed through the supply from a fluid feeding means 8 and shown by the arrow. The abrasive grains 2 held on the sheet 1 are attached onto the minute projections of the alumina particles on the disc 3 surface by the load application onto each surface of the sheet 1 by a pressing body 4. Then, only the alumina particles are ground, and a disc having a superfine clean surface can be obtained, suppressing the binder of the sheet 1 from being destroyed.
申请公布号 JPS6368351(A) 申请公布日期 1988.03.28
申请号 JP19860210658 申请日期 1986.09.09
申请人 HITACHI LTD 发明人 SUZUKI SHOJI;IMAMURA MASAAKI;ITO YASUSHI;OTANI YUICHI;KAWAMURA YOSHIO;TSUCHIYAMA RYUJI
分类号 B24B21/00;G11B5/84 主分类号 B24B21/00
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