MANUFACTURE OF SEMICONDUCTOR CARBON THIN FILM,申请号JP19860211855-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR CARBON THIN FILM
摘要
申请公布号	JPS6367717(A)	申请公布日期	1988.03.26
申请号	JP19860211855	申请日期	1986.09.09
申请人	MEIDENSHA ELECTRIC MFG CO LTD	发明人	WATANABE MISUZU
分类号	H01L21/203	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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