| 摘要 |
PROBLEM TO BE SOLVED: To keep constant the frictional state between a semiconductor substrate and an abrasive cloth by providing a mechanism for changing load so that the torque current value is constant. SOLUTION: The frictional state between a semiconductor substrate 1 and an abrasive cloth 4 is transmitted to a motor part 7 connected to a base plate 3. By a torque current conversion monitor mechanism 8 provided in such a manner that the torque current extracted from the motor part 7 connected to the base plate 3 is always constant, a difference between the preset torque current and the obtained torque current value is calculated, and transmitted to a load converter 9 for controlling what load is applied to the semiconductor substrate 1. The load value to a support plate 2 is changed to keep constant the frictional state between the semiconductor substrate 1 and the abrasive cloth 1. |
