发明名称 |
Process and apparatus for producing microfilters, and a microfilter produced accordingly |
摘要 |
The process for producing microfilters from metal foils or plastic films provides that the filter film or foil is irradiated through a perforated mask by electron beams, hard X-rays or other short-wave rays of high intensity. <IMAGE> |
申请公布号 |
DE3631804(A1) |
申请公布日期 |
1988.03.24 |
申请号 |
DE19863631804 |
申请日期 |
1986.09.18 |
申请人 |
ALTENBURGER ELECTRONIC GMBH |
发明人 |
VERZICHT DES ERFINDERS AUF NENNUNG |
分类号 |
B01D67/00;B01D71/02;B29C35/08;B29C59/16;G03F7/20 |
主分类号 |
B01D67/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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