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发明名称
FINE PROCESSING
摘要
申请公布号
JPS6365628(A)
申请公布日期
1988.03.24
申请号
JP19860207943
申请日期
1986.09.05
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
KURE TOKUO;KAWAMOTO YOSHIFUMI;MORIMOTO TADAO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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