| 摘要 |
PURPOSE:To directly obtain the titled thin plate from a molten state in good yield, by melting polycrystalline silicon fed above a water-cooled copper hearth with an electron gun, feeding the molten silicon into the hearth, sticking the molten silicon onto a water-cooled rotating drum and winding up the resultant silicon strip. CONSTITUTION:Polycrystalline silicon 1 in the form of a rod, etc., is horizontally fed onto a water-cooled copper hearth 2 in a device for producing the titled thin plate provided in a vacuum vessel at a constant speed and the tip part thereof is placed above the hearth 2 and melted with an electron gun 3 to feed proplets into the hearth 2. The droplets are subsequently melted with the electron gun 3 to give molten silicon 8, which is made to stick to a water- cooled rotating drum 4 having lateral stripes 7 of 0.1-0.3mm width at a regular interval, coagulated and wound upward to provide a silicon thin plate 5. The resultant silicon thin plate 5 is peeled from the drum 4 with a scraper 6. |
