| 摘要 |
PURPOSE:To realize the titled sensor with little acceleration response noise by constituting to make an antiresonance point of an elastic member (supporting rod) and the resonance point of the sensor in acceleration responding output to the same or close frequency. CONSTITUTION:Piezoelectric elements 1 and 2 for driving and piezoelectric elements 3 and 4 for detection are joined directly mutually and edges of the elements 1 and 2 are joined with a metallic member 5 which is supported by the supporting rod 6 to constitute a tuning fork oscillator. Then, when, for instance, the dimensions of the elements 3 and 4, the elements 1 and 2, the member 5 and the rod 6 are regulated to 9mm (L) X 1.5mm (W) X 0.35mm (T), 9mm (L) X 1.5mm (W) X 0.5mm (T), 1.8mm (L) X 1.5mm (W) X 1.5mm (H), 0.5mm (phi) X 4mm (L), respectively, when the acceleration takes place on the sensor, the resonance point of the rod 6 is made to 360Hz by a shape effect of the rod 6 and the antiresonance point is made to the same 1,100Hz as the resonance point of the sensor and the acceleration response noise of the resonance point of the sensor can be reduced by an extent of 15dB by the cancellation effect. |
