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经营范围
发明名称
VAPOR PHASE EPITAXY METHOD
摘要
申请公布号
JPS6364323(A)
申请公布日期
1988.03.22
申请号
JP19860207851
申请日期
1986.09.05
申请人
HITACHI LTD
发明人
WATANABE AKISADA;KURODA TAKARO;MIYAZAKI TAKAO;MATSUMURA HIROYOSHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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