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发明名称
HANDLER UNIT FOR TESTING IC PRODUCT
摘要
申请公布号
JPS6364335(A)
申请公布日期
1988.03.22
申请号
JP19860208803
申请日期
1986.09.04
申请人
TOKYO ELECTRON LTD
发明人
KURONO YOICHI;INOUE JUNICHI
分类号
G01R31/18;H01L21/66
主分类号
G01R31/18
代理机构
代理人
主权项
地址
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