| 摘要 |
A method and apparatus for locating defects in an electrical circuit with a light beam. At least one scan point within the electrical circuit is driven with a repeating voltage progression. The light beam disrupts the function of the electrical circuit when scanning by releasing charge carriers at scan points. A voltage at every scan point with which this scan point is driven is varied or held constant. Those weak points which cause the electrical circuit not to achieve a desired specification are located. At every scanning of every scan point, at least one single period of the repeating voltage progression is completed. At every scan point, at least one critical parameter for the desired specification of the electrical circuit is modulated, until the electrical circuit malfunctions.
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