| 摘要 |
PURPOSE:To keep current density in a laser tube constant, and to conduct laser oscillation with high efficiency by mounting a plurality of electrodes and outputting a high-frequency power supply to each electrode in response to a required output. CONSTITUTION:A laser medium gas is circulated in a laser tube 1, electricity is discharged, and laser beams are amplified. Separate high-frequency power supply 21-28 is each connected to electrodes 31-38. When outputs only of half the whole, is sufficient a signal where the power supplies 23-26 are made effective and other power supplies 21, 22, 27, 28 are turned OFF is transmitted through an output control line 42 from an output control circuit 41. Consequently, current density at a central section is made the same as the whole outputs, and a TEM00 mode is acquired, but an output from laser beams is approximately proportional to the number of the effective high-frequency power supplies. Accordingly, laser oscillation is performed with high efficiency. |
