| 摘要 |
<p>PURPOSE:To obtain a cathode having stabilized and good electron emission characteristic for a long period of time by covering the cup surface made of Mo series with Re and Ru or an alloy layer having either Re or Ru as its main component and impregnating a cathode substrate including the cup and the sleeve with electron emission substance after deposition thereof. CONSTITUTION:Vapor deposition 3 of Re and Ru or an alloy of either Re or Ru is made by CVD on the surface of a cup 2 made of either Mo or an alloy thereof to contain a cathode substrate 1 made of W porous sintered body with porosity of 20-25%. A laser beam is radiated to the side of the cup 2 to deposit the substrate 1 to the cup 2. And, prescribed electron emission substrate is fused and impregnated in H2 to polish and remove the excess stuck to the periphery thereof. Then, it is fitted to a Ta-made sleeve to be subjected to laser deposition. Carbonyl carbonyl can be used instead of an Re or Ru series film. With the use of a Mo sleeve, the cathode, the cup and the sleeve can be deposited simultaneously.</p> |
