发明名称 Semiconductor laser device having integral optical output modulator
摘要 A semiconductor laser device comprises a semiconductor laser portion (17) including a double hetero structure and a vertical MIS-FET portion (18) form on, and in series with, the semiconductor laser portion (17). The vertical MIS-FET portion (18) includes an n-type GaAs layer (6), a p-type GaAs layer (7), an n-type GaAs layer (8), and a striped groove (31) having V-shaped cross-section formed from the top surface of the n-type GaAs layer (8) to the n-type GaAs layer (6). A metal gate electrode (11) is further provided on the top surface of the striped groove (31), on an insulating film (10). A current (41)flowing through the vertical MIS-FET portion (18) is changed according to a photo modulating signal applied to the metal gate electrode (11) and, a current (40) is also changed according to the current (41). Accordingly, a laser oscillation output of the semiconductor laser portion (17) is also changed to accomplish the optical output modulation of the semiconductor laser.
申请公布号 US4733399(A) 申请公布日期 1988.03.22
申请号 US19860856937 申请日期 1986.04.25
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 MIHASHI, YUTAKA;NAGAI, YUTAKA
分类号 H01S5/00;H01S5/026;H01S5/042;H01S5/06;H01S5/062;H01S5/22;(IPC1-7):H01S3/19 主分类号 H01S5/00
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