FILTER MEDIUM FOR AIR FILTER AND PROCESS FOR PRODUCING THE SAME

摘要

An air filter for collecting suspended particulate substances in air, which is prevented from generating organic or inorganic substances problematic in semiconductor device production. A binder comprising as the main component an aqueous dispersion of a copolymer of a hydrophilic monomer with a hydrophobic monomer is used for bonding fibers together to produce an air filter. An organic peroxide is used as a polymerization initiator in producing the copolymer. When this air filter (8) is disposed on the downstream side of a chemical filter (7), the space (4) on the downstream side of the air filter (8) becomes substantially free from organic or inorganic substances problematic in semiconductor device production.