Process for producing undercut dummy gate mask profiles for MESFETs,申请号US19870031648-传众专利搜索

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发明名称	Process for producing undercut dummy gate mask profiles for MESFETs
摘要
申请公布号	US4732871(A)	申请公布日期	1988.03.22
申请号	US19870031648	申请日期	1987.03.30
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	BUCHMANN, PETER L.;GRAF, VOLKER;HOH, PETER D.;MOHR, THEODOR O.;VETTIGER, PETER
分类号	H01L21/033;H01L21/285;H01L21/311;H01L21/318;H01L21/336;H01L21/338;H01L29/812;(IPC1-7):H01L21/265	主分类号	H01L21/033
代理机构		代理人
主权项
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