METHOD AND DEVICE FOR CHEMICAL POLISHING,申请号JP19860205618-传众专利搜索

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发明名称	METHOD AND DEVICE FOR CHEMICAL POLISHING
摘要
申请公布号	JPS6362891(A)	申请公布日期	1988.03.19
申请号	JP19860205618	申请日期	1986.09.01
申请人	TOYOTA MOTOR CORP	发明人	TSUTSUMI HAJIME;TANAKA HOZUMI;KOZUKA SHOICHI;SATO MATSUJI;SUGIYAMA HITOSHI;NAKANO YOSHIO
分类号	C23F3/00	主分类号	C23F3/00
代理机构		代理人
主权项
地址

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