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发明名称
PROBE CARD
摘要
申请公布号
JPS6362343(A)
申请公布日期
1988.03.18
申请号
JP19860208173
申请日期
1986.09.03
申请人
NEC CORP
发明人
NAKAO HIROSHI
分类号
G01R1/073;G01R31/26;H01L21/66
主分类号
G01R1/073
代理机构
代理人
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地址
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