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经营范围
发明名称
ETCHING METHOD OF SEMICONDUCTOR
摘要
申请公布号
JPS6362235(A)
申请公布日期
1988.03.18
申请号
JP19860206629
申请日期
1986.09.02
申请人
FUJI ELECTRIC CO LTD
发明人
KUNIHARA KENJI
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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