| 摘要 |
PURPOSE:To prevent the breakage of a quartz tube caused by slipping-down, etc., from arms supporting the quartz tube by providing nonslip material, such as gum, O-ring, to the arms. CONSTITUTION:The two arms 2 supporting the quartz tube 1 are lowered to a chemical liquid tank by a vertical arm driving part 4 to wash the quartz tube 1. In this case, as one end face of the quartz tube is smaller than that of the other end, the quartz tube must be slanted when lowered to be submerged into the chemical liquid or when raised to be taken out from the chemical liquid. O-rings 5 to prevent slipping are provided to the arms 2 supporting the quartz tube 1. The breakage of quartz tube 1 caused by slipping-down, etc., is prevented thereby, and the material cost of expensive quartz tubes can be reduced. |
