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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6362356(A)
申请公布日期
1988.03.18
申请号
JP19860208410
申请日期
1986.09.03
申请人
MITSUBISHI ELECTRIC CORP
发明人
HARADA HIROTSUGU
分类号
H01L21/3205;H01L23/52
主分类号
H01L21/3205
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代理人
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