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发明名称
STRIPPING SOLVENT FOR PHOTORESISTS
摘要
申请公布号
EP0219789(A3)
申请公布日期
1988.03.16
申请号
EP19860114147
申请日期
1986.10.13
申请人
HOECHST AKTIENGESELLSCHAFT
发明人
MERREM, HANS-JOACHIM, DR.;SCHMITT, AXEL, DR.
分类号
G03C11/00;G03F7/00;G03F7/26;G03F7/42;H01L21/027;H01L21/30;(IPC1-7):G03F7/26
主分类号
G03C11/00
代理机构
代理人
主权项
地址
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