METAL ORGANIC CHEMICAL VAPOR DEPOSITION METHOD,申请号JP19860202683-传众专利搜索

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发明名称	METAL ORGANIC CHEMICAL VAPOR DEPOSITION METHOD
摘要
申请公布号	JPS6360522(A)	申请公布日期	1988.03.16
申请号	JP19860202683	申请日期	1986.08.30
申请人	FUJITSU LTD	发明人	NAKAI KENYA
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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