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发明名称
摘要
申请公布号
JPS6311773(B2)
申请公布日期
1988.03.16
申请号
JP19790154039
申请日期
1979.11.28
申请人
SUMITOMO ELECTRIC INDUSTRIES
发明人
KIKUCHI KENICHI;HAYASHI HIDEKI
分类号
H01L29/78;H01L21/28;H01L21/316;H01L21/336
主分类号
H01L29/78
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