| 摘要 |
PURPOSE:To easily control the density and speed of a plasma jet by using a method wherein an electric field and a magnetic field are orthogonally crossed to drive forward the plasma. CONSTITUTION:A driving device 3 is provided with driving magnets 1a and 1b and driving electrodes 2a and 2b in a film forming device having the plasma driving device 3. The magnets and electrodes are arranged so that the generated magnetic field and electric field are orthogonally crossed. The inside of a treating chamber 10 is firstly evacuated, gases A and B are supplied to keep the chamber at a specified vacuum, a microwave is simultaneously supplied through a waveguide 4, an adjustable plate 8 is moved up and down to obtain matching, and plasma is formed by electric discharge in a coaxial tube 6. The plasma is sent into the driving device 3 by the exhaust of a pump 11, and flows into the chamber 10 as a plasma jet by the driving force due to the orthogonally crossed magnetic field and electric field. The density and speed of the plasma jet can be easily controlled by the voltage between the magnet 1 and the electrode 2. |
