| 摘要 |
A buried hetero-structure laser diode is disclosed. The buried hetero-structure is formed by growing a double hetero-structure on a substrate. The double hetero-structure comprises two cladding layers spaced apart by a narrow bandgap active layer. Two spaced apart channels are etched in the double hetero-structure down to the lower cladding layer to define a mesa therebetween. Current blocking layers are deposited in the channels and on the portions of the double hetero-structure located outside the channels. The liquid phase epitaxy growth conditions are such that while the blocking layers are deposited in the channels and outside the channels, the upper cladding layer portion of the mesa is being melted back. Thus, the ends of the blocking layers touching the melted back mesa are separated from the active layer portion of the mesa by a thickness substantially less than the thickness of the upper cladding layer as measured in the regions outside the channels.
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