摘要 |
Method for silane preparation esp. the dispropornation and/or redistribution rxn used to produce monosilane and/or chlorosilane. Silane, esp. monos>lane is useful material for the manufactur of the semiconductor, an amorphous solar cell, and photosentisizer. Chlorosilane SiHnCl4-n (1 <= n <= 3) was disproportionated under the organic macromolecule or 4th order phosphonium salt bonded polymer. Here, P is organic macromolecule or polymer, A is phosphonium and organic macro molecules or bridged group of polymer, and R1, R2 and R3 are hydrogen, C1-20 alkyl and allyl group and X is halogen atom. Surface area of organic macromolecule is 2-1000 m2/g range.
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