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发明名称
EXPOSURE DEVICE
摘要
申请公布号
JPS6358827(A)
申请公布日期
1988.03.14
申请号
JP19860201633
申请日期
1986.08.29
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
TAKAMOTO KIICHI;OZAKI YOSHIHARU
分类号
G03F7/20;H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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