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发明名称
ELECTRON MICROSCOPE
摘要
申请公布号
JPS6358747(A)
申请公布日期
1988.03.14
申请号
JP19860201348
申请日期
1986.08.29
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
KITAGAWA MASAKI;OTOMO AKIRA;FUJIMOTO TERUO
分类号
H01J37/09;H01J37/20;H01J37/244
主分类号
H01J37/09
代理机构
代理人
主权项
地址
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