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发明名称
RADIO FREQUENCY PLASMA REACTOR IN WHICH REACTION SAMPLE JETTING PART IS INSERTED INTO PLASMA FLAME
摘要
申请公布号
JPS6358799(A)
申请公布日期
1988.03.14
申请号
JP19860202277
申请日期
1986.08.28
申请人
NIPPON KOSHUHA KK
发明人
IMAI SHIRO
分类号
C23C16/50;G01N21/73;H05H1/42
主分类号
C23C16/50
代理机构
代理人
主权项
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