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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPS6358873(A)
申请公布日期
1988.03.14
申请号
JP19860202975
申请日期
1986.08.29
申请人
TOSHIBA CORP
发明人
NAGAKUBO YOSHIHIDE
分类号
H01L23/522;H01L21/336;H01L21/768;H01L29/78
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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