| 摘要 |
PURPOSE:To obtain a soft-magnetic nitriding magnetic alloy film having thermally stable characteristics, by specifying a composition consisting of one or more elements among Co, Fe, Ni, and Mn, one or more elements among Ti, Nb, Hf, Zr, Ta, W, Mo, and Cr, and N and also by modulating the above composition in the direction of film thickness. CONSTITUTION:The nitriding magnetic alloy film has a composition represented by TxMyNz (where T means one or more elements among Co, Fe, Ni, and Mn, M means one or more elements among Ti, Nb, Hf, Zr, Ta, W, Mo, and Cr, the symbols (x), (y), and (z) stand for, by atom, 65-94%, 5-25%, and 0.1-20%, respectively, and x+y+z=100). Further, respective compositions of %, M, and N are modulated in the direction of film thickness in the above film. This film shows soft magnetism and moreover, it is excellent in thermal stability of magnetic properties and combines wear resistance with high specific resistivity. It is preferable that the above compositional modulation is constituted so that respective maximums of the compositional modulations of M and N in the direction of film thickness become minimum of T and also it is desirable that compositional modulation wavelength in the direction of film thickness is regulated to <=1,000Angstrom . |
