Confocal microscope and height measurement method using the same

摘要

A confocal microscope which uses a confocal disk, comprising a light source, a high-NA and low-magnification objective lens which forms an image of said confocal disk obtained by irradiation with a light from the light source on a sample, a first image formation lens system disposed between said confocal disk and said objective lens, first image formation lens driving means for moving said first image formation lens system in a light axis direction and adjusting a focal point position of said objective lens with respect to said sample, and a second image formation lens system which forms a sectioning image formed on said confocal disk into an image in photoelectric conversion means.