POSITIVE RADIATION SENSITIVE COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a positive radiation sensitive composition excellent in resolution and sensitivity. SOLUTION: The positive radiation sensitive composition contains (A) an amorphous compound containing a plurality of phenol groups protected by t-butoxycarbonyl groups in one molecule and having a molecular weight of <=3,000 and (B) diphenyliodonium 9,10-dimethoxyanthracene-2-sulfonate as an acid generator which generates an acid under radiation.