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发明名称
MAGNETRON SPUTTERING DEVICE
摘要
申请公布号
JPS6357764(A)
申请公布日期
1988.03.12
申请号
JP19860199149
申请日期
1986.08.27
申请人
TEIJIN LTD
发明人
SUGIYAMA MASATO;ARAI SHINJI
分类号
C23C14/36;C23C14/35
主分类号
C23C14/36
代理机构
代理人
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地址
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