| 摘要 |
PURPOSE:To obtain a structure wherein a decrease in the natural vibration frequency of a piezoelectric element is suppressed by performing displacement by plural piezoelectric driving parts independently in at least two axial directions among three orthogonal axial directions including the direction of connection. CONSTITUTION:Piezoelectric driving parts 1G and 1K constitute an X-directional inching mechanism, piezoelectric driving parts 1A and 1C constitute a Y-directional mechanism, and piezoelectric driving parts 1B, 1D, 1F, and 1H constitute a Z-directional mechanism respectively. For example, when the piezoelectric driving parts 1A and 1C apply voltages between those opposite electrodes 21A and 31A, and 21C and 31C, the gaps between the electrodes expand or contract according to the polarities of the voltages and piezoelectric constants that the piezoelectric driving parts 1A and 1C have to cause the Y-directional displacement, i.e. inching motion irrelevantly to other directions. Similarly, the independent directional inching mechanisms are constitute to cause inching in the X and Y directions, and those inching mechanisms are prevented from decreasing in natural vibration frequency extremely by connecting the piezoelectric driving parts 1D and 1F where connection parts 1E are provided at the intermediate parts in the different directions. |
