HAND OF ROBOT FOR TRANSFERRING WAFER

摘要

PURPOSE: A hand of a robot for transferring a wafer is provided to transfer correctly a wafer to a desired position by preventing a contact between the wafer and the hand of the robot in a wafer transfer process. CONSTITUTION: A plate(3) is formed at an end portion of a hand(51). The plate(3) has a circular shape. An absorbing hole(1) is formed in a center portion of the plate(3). A supply hole(2) is formed on an outer circumference of the plate(3). A chamber plate(6) is adhered on a bottom face of the plate(3). A ring-shaped chamber(4) for filling air supplied from the supply hole(2) is formed in the chamber plate(6). A plurality of exhaust holes(5) are formed on the chamber plate(6). The first pump(7) is used for supplying the air to the supply hole(2). An absorbing portion is formed by the second pump(8). The absorbing portion is used for absorbing the wafer(W). A guide projection(9) is formed on a bottom face of the chamber plate(6).