| 摘要 |
<p>PURPOSE:To reduce a shock by each providing a plurality of support means extending to an oblique lower section so that their noses gather and a means for moving a plurality of the support means in the direction that the noses of the support means are separated or approached. CONSTITUTION:Positioned wafers 2 are grasped by L-shaped fingers 32 for a feeder 6. The feeder 6 is carried up to the upper section of a susceptor 7 under the state, and the wafers 2 are positioned at the upper section of a spot facing 7a. When only the L-shaped fingers 32 are transferred in the mutually separate directions and the wafers 2 are dropped onto guide fingers 34, three positions in the peripheral sections of the wafers 2 and the guide fingers 34 are brought into contact, and the wafers 2 are supported to the guide fingers 34 once. When the guide fingers 34 are shifted in the mutually separate directions, the wafers 2 slide on the guide fingers 34, but the nose sections of the guide fingers 34 are disposed on the surface of the susceptor 7 extremely adjacently, thus placing the wafers 2 without a shock into the spot facing 7a. Accordingly, the wafers can be supplied and discharged automatically without being brought into contact with the surfaces of the wafers.</p> |
