| 摘要 |
<p>PURPOSE:To sample wafers properly from a large number of wafers by a method wherein the wafers being carried are sampled appropriately, and stored in a second wafer storage mechanism while a dummy is transferred to a first wafer storage mechanism in place of the sampled wafers, and stored together with other wafers. CONSTITUTION:A wafer W from a pre-process is stopped at a point A. When the wafer W is not sampled, it is stored in a laminating stocker 6. When the wafer W is sampled, a suction arm 21 is lowered, and the wafer W is sucked to a sucking section 22. The suction arm 21 is elevated and turned, and stopped at a point B, and the suction of the wafer W is released. A dummy D is attracted by the suction arm 21, and the attraction of the dummy D is released at the point A. The suction arm 21 is lifted up to the position of an origin while the dummy D placed at the point A is stored into the laminating stocker 6. The wafer W placed at the point B is housed into a wafer cassette 7.</p> |
